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We investigate the effects of the configurations of the chamber and the coil of an inductively coupled plasma etcher and the process parameters on the homogeneity of plasma distribution.Using the modules of plasma,electromagnetic field,etc.in the commercial software CFD-ACE+,a two-dimensional discharge model of an ICP etcher was built.

为研究感应耦合等离子体刻蚀机腔室与线圈结构以及工艺参数对等离子体分布均匀性的影响，基于商业软件CFD-ACE+中等离子体与电磁场等模块建立了ICP刻蚀机二维放电模型。

This thesis described the etching characteristics of silicon nitride passivation films in the thin-film transistor structure using an enhanced capacitive-coupled high-density plasma etcher. The main parameters used in these experiments were RF source power, RF bias power, chamber pressure, SF6, O2 and He gas flow rates.

中文摘要本研究以加强型电容耦合式高密度电浆蚀刻机台来研究蚀刻氮化矽结构，实验操作参数为射频电浆源功率、射频偏压源功率、SF6、O2、He气体流量和腔体压力。

Methods Starting from 2-chloro-4-nitrophenol and 2- pyridine hydrochlorid, 3-chloro-4-(pyridin-2-ylmethoxy) aniline was obtained via etherization and reduction. The obtained aniline coupled with N-(4-chloro-3-cyano-7-ethoxyquinolin-6-yl) acetamide to give 4-[3-chloro-4-(2-pyridylmethoxy) phenylamino]-3-cyano-7-ethoxy-6-N-acetylaminoquinoline. And then it was deacetylated, followed by reacting with4- but-2-enoyl chloride to yield the target compound neratinib.

以2-氯－4-硝基苯酚和2-氯甲基吡啶为起始原料，经醚化、硝基还原得到3-氯－4-（吡啶－2-甲氧基）苯胺，3-氯－4-（吡啶－2-甲氧基）苯胺与3-氰基－6-乙酰氨基－7-乙氧基－4-氯喹啉反应得到3-氰基－6-乙酰氨基－4-［3-氯－4-（吡啶－2-甲氧基）苯氨基］－7-乙氧基喹啉，3-氰基－6-乙酰氨基－4-［3-氯－4-（吡啶－2-甲氧基）苯氨基］－7-乙氧基喹啉去乙酰保护基后，与-4-二甲氨基－2-丁烯酰氯经酰化反应得到ner-atinib。

The traffic momentum differential equation and Euler's equation for the ramp junction is founded by means of differential calculus in this paper,the traffic momentum differential coupled equation is solved by characteristic curve method,two groups of characteristic curves and corresponding related equation in high speedstates and low speedstates are presented.

采用特征线法对运动微分方程组进行分析求解，在高速低密度区和低速高密度区分别得到了两组特征线和对应的特征关系式。

Coupled with the often large amount of time needed to read the terms, the expected payoff from reading the contract is low and few people would be expected to read it.

与通常需要经过大量时间耦合条件，从读合同预期收益低，很少人会预料阅读。

By extending the square map, a one-dimensional generalized square map with exponential factor is constructed, and its corresponding two-dimensional map is obtained via one-order coupled item in this paper.

由平方映射延伸构造出了一类含指数项的广义平方映射，并由一维映射通过一次耦合项得到了二维映射。

By extending the square map,a one-dimensional generalized square map with exponential term is constructed,and its corresponding two-dimensional map is obtained via one-order coupled item in this paper.

由平方映射延伸构造出了一类含指数项的广义平方映射，并由一维映射通过一次耦合项得到了二维映射。

In the last chap-ter,the natural integral equation and natural boundary element method forharmonic problem on exterior elliptic domain are introduced.Then,based onthis,the natural boundary reduction method for a kind of exterior problem ofanisotropic constant coefficients elliptic equation is discussed, the natural inte-gral equation and its solving method on circular boundary and elliptic bound-ary are obtained.These results can be directly applied in coupled methodand DDM for exterior boundary value problem.

最后，讨论了椭圆外区域调和问题的自然积分算子即D-N算子及自然边界元方法，并基于此研究了一类各向异性常系数椭圆型方程外问题的自然边界归化方法，首次得到其在圆周边界及椭圆边界上的自然积分方程及其求解方法，并将这些结果直接应用于外边值问题的耦合算法。

One is the epidemic spreading; the other is the synchronization of coupled oscillators. First, concepts of complex networks are introduced to make the thesis facilely.

研究传染病(或者计算机病毒、谣言、信息等)在网络上的传播规律，并采取相应的措施进行预防和控制，是网络动力学研究的一个基本方向。

Another straight electrode was placed outside the fascicle as reference electrode. Both distal ends were coupled to electromyogram.

以神经束外一直微电极作参考电极，远端连接肌电图仪。

Aquatic or marsh-growing fern allies; known to have existed since the Cenozoic; sometimes included in Lycopodiales.

生活于水中或湿地的蕨类；从新生代生存至今；有时归于石松目之中。

The engine was uprated from a 90hp Franklin to a 125hp Lycoming.

改良过的引擎是从90hp到125hp莱康明富兰克林。