机械地

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

This is accomplish ed by piercing the diaphragms and mechanically connecting the upper and lower stems.

这是通过穿透横膈膜，把上下阀杆机械地连接在一起来实现的。

The Pan-Islamism advocated by Afghani was built on the framework of the methodology of striving for human's rational and wisdom judgment not on the foundation of the dogmatic repeating and mechanic copying.

阿富汗尼主张的泛伊斯兰主义是构建于充分发挥人类理性和智慧判断的方法论框架中，绝不是像教条主义那样机械地模仿和照搬。

I was temping then, doing mindless data entry, tapping words into a computer, and moving on wondering what worth there was, and how to find it.

那时我正在打一份临时工，每天机械地把资料输入电脑，边打字边质疑着做这些工作的价值，以及如何才能实现它的价值。

She smooths her hair with automatic hand

她机械地用手理了理头发

Watch Mr. Jackson live at the Super Bowl halftime show in 1993, wearing his trademark dark glasses and ponytail with loose locks falling forward over the brow, starting out in quasi-military uniform, and you see he does everything the audience wants with skill, energy and almost no spontaneity. Even the anger seems synthetic now.

观看杰克逊先生在1993年超级杯中场时的现场表演——戴着他的招牌墨镜、梳着眉前留了几绺疏松头发的马尾辫，他穿着类似军服的服装走上舞台，你可以看到他用技能、气力几乎机械地做着观众所希望见到的一切动作，即使连他愤怒的表情现在看来也像是虚假的。

A spring may be mechanically coupled to the wheel plate to support at least a portion of a static mass of the vehicle.

弹簧机械地耦合至轮板以支撑车辆的静止质量的至少一部分。

The house cleared, I shut myself in, fastened the bolt that none might intrude, and proceeded — not to weep, not to mourn, I was yet too calm for that, but — mechanically to take off the wedding-dress, and replace it by the stuff gown I had worn yesterday, as I thought, for the last time.

人去楼空，我把自己关进房间，拴上门，免得别人闯进来，然后开始——不是哭泣，不是悲伤，我很镇静，不会这样，而是——机械地脱下婚礼服，换上昨天我要最后一次穿戴的呢袍。

He took the two candlesticks mechanically, and with a bewildered air.

他机械地接了那两个烛台，不知道怎样才好。

We should not try to mechanically implement the experiences of the revolution of 20th century and should keep in mind the specificities of 21st century and should also keep in mind the specificities of our struggle.

我们不应该机械地运用20世纪革命的经验，应该记住21世纪的特点，还应该记住我们斗争的特点。

Since historical times,England ,where the early inhabitants were Celts, has been conquered three times .

从有历史以来，英国，在此地早期居住的是凯尔特人，已经被征服了三次。

Bluetooth OBEX File Transfer Enables the sending and receiving of files on your phone via Bluetooth.

蓝牙OBEX文件移动允许经过蓝牙传送和接受文件。。。。