分子束

This dissertation mainly focused on the growth and characterization of GaN based materials grown by radio frequency plasma assisted molecular beam epitaxy. Some of the devices related technics, such as etching and ohmic contact, were also discussed.

本文研究了GaN和AlGaN/GaN材料的射频等离子体分子束外延生长及其特性，并对相关器件工艺中的若干重要问题如刻蚀、欧姆接触等，进行了初步探索。

The main task of this paper is to investigate the growth of high quality single crystalline Zinc Oxide thin film on sapphire (0001;α-Al_2O_3) substrate via radio frequency plasma-assisted molecular beam epitaxy. The work will lay a foundation for application of novel semiconductor material, ZnO, in the field of photoelectronic devices.

本论文的主要任务是研究在蓝宝石(0001)衬底上利用射频等离子体辅助分子束外延系统生长出高质量的氧化锌单晶外延薄膜，为ZnO这一新颖的半导体材料在光电子器件方面得到应用打下基础。

InNSb alloy films were prepared on GaAs (001) substrates by N2 radio frequency plasma-assisted molecular beam epitaxy, the N composition and micro-structures of the samples were characterized by atom force microscopy, scanning electron microscopy, X-ray diffraction and Raman spectroscopy.

本文利用射频氮等离子辅助分子束外延（RF-MBE技术在GaAs（001）衬底上生长稀氮InNSb半导体薄膜，并通过原子力显微镜、电子扫描显微镜、X射线衍射仪、拉曼散射光谱等测量手段对样品的微结构和氮组分等进行了表征。

This dissertation is dedicated to investigate the pyrolysis of the fuel-bonded nitrogen model compounds,including five-membered ring nitrogen model compound pyrrole and the substituted six-membered ring nitrogen compound 4-methyl pyridine,with vacuum ultraviolet single-photon ionization combined with molecular beam mass spectrometry technique.

本论文利用同步辐射真空紫外单光子电离、分子束取样和反射式飞行时间质谱相结合的技术研究了含氮杂环模型化合物的热解，包括五元环含氮体系、六元环含氮体系和替代的六元环含氮体系(4-甲基吡啶)。

Structure dynamics ofstrongly reduced epitaxial barium titanate (BaTiO3-x) thin films were investigated byMicro-Raman scattering technique, Rutherford backscattering spectrometry, X-raydiffraction, and asymmetric rocking curves.

我们用显微拉曼、卢瑟福背散射谱、X射线散射和非对称摇摆等实验手段研究了在10-2到10-5帕氧气压下用激光分子束外延技术生长的BaTiO3-x薄膜的结构动力学特性。

In this thesis, I mainly introduce my recent work about the structure of Cr films growth on GaAs (001) surface, the spin density wave of fcc Fe on Cu (100), magnetism of bcc Ni on GaAs (001), interface magnetism of Co/Pd (100) epitaxied by Pulse Laser Deposition.

本论文针对金属Cr在GaAs（001）表面的外延结构和机理，超薄fcc Fe／Cu（100）体系的磁性，金属Ni的体心立方结构的磁学性质，用激光分子束外延制备的Co／Pd（100）界面的磁学性质等问题展开了一些研究，得到了以下结果。

MBE growth;Quantum well;Stibium;Photodetector;Photo transistor

中文关键字分子束磊晶生长；量子井；锑；光侦测器；光电晶体

The vicinal surfaces of a crystal consist of step structure, which directly affects the chemical and physical process on the surface.

在分子束外延生长实验中，都是假定衬底表面是均匀光滑的，但是真实的晶体表面是有台阶结构的。

However, the real crystal surface is far from being like that. The vicinal surfaces of a crystal consist of step structure, which directly affects the chemical and physical process on the surface.

在分子束外延生长实验中，都是假定衬底表面是均匀光滑的，但是真实的晶体表面是有台阶结构的。

Recent years, with the development of modem grown technology insuperthin layer material (e.g. MBE and MOVCD) and various super-elaborate artifactitious technology, the study in small scale semiconductor microcavity arouses people\s interests.

近年来，随着现代超薄层材料生长技术(以分子束外延MBE和金属有机化合物汽相淀积MOCVD等技术为典型代表)和各种超精细加工技术的发展，小尺度半导体微腔的研究引起人们的兴趣。

Chrysanthemum of 10 thousand birthday is lax to edaphic requirement, with the arenaceous qualitative loam with fecund, good drainage had better.

万寿菊对土壤要求不严，以肥沃。排水良好的砂质壤土为好。

He unstepped the mast and furled the sail and tied it.

他拔下桅杆，把帆卷起，系住。