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The invention discloses a method to integrate single CMOS with bulk silicon microelectromechanical system, its technical project: 1 forming isolating groove: adopting deep-groove etching, and SiO2 and polycrystal silicon filling to realize the insulation of MEMS structure and CMOS circuit; 2 making standard CMOS circuit; 3 using SiO2 and Si3N4 as mask, etching silicon on the back until exposing SiO2 at the bottom of the isolating groove, to complete the thickness control for MEMS silicon structure layer; 4 completing metalizing the CMOS circuit and masking the MEMS structure: MEMS structure region uses Al as mask and CMOS circuit region uses thick photoetching glue as mask, using DRIE to release silicon structure.

本发明公开了一种将单片CMOS与体硅微机械系统集成的方法,其技术方案为:1形成隔离槽:采用深槽刻蚀,SiO 2 和多晶硅填充,实现MEMS结构和CMOS电路的绝缘;2完成隔离槽后进行标准CMOS电路的加工;3用SiO 2 和Si 3 N 4 掩膜,从背面腐蚀硅,直至暴露出隔离槽底部的SiO 2 ,完成MEMS硅结构层的厚度控制;4完成CMOS电路金属化和MEMS结构掩膜:MEMS结构区用铝掩膜,CMOS电路区用厚光刻胶掩膜,用DRIE释放硅结构。用本发明方法不仅获得了较大的质量块,而且用本发明较高的深宽比制出的结构电容,同时实现了体硅微机械与CMOS电路的集成,显著提高MEMS传感器的精度和稳定性,具有前沿性和重要实用价值。

The influence of the structure and material parameters on static and dynamic characteristics is studied. The three dimensional static analysis is obtained by the power series expansion method for a piezoelectric composite laminates. Three dimensional distribution of bonding stress, displacement and electric potential are presented. The distributions of electric potential across thickness of two kinds piezoelectric materials are discussed.

对于静态问题,采用三维精确解方法,给出了压电层与基体之间剪应力、位移、电势的三维分布图;讨论了工程中常用的两类压电材料在感知和动情况下沿压电材料厚度方向电势的分布情况,分析了电势可看线性分布的条件;讨论了压电层和粘结层的厚度及材料特性变化对压电感知和动效果的影响,并对压电层的厚度了优化分析。

In this paper we review historical development of the principle of least action ,pointing out its important rolein modern physics and cosmology.

本文评述了最小用量原理的历史发展,指出了它在现代物理学、现代宇宙学中的重要地位,探讨了用量概念的物理意义以及最小用量原理的哲学意义。

If I were the quarterback, I would...

如果四分卫换是我的话,我就会怎样怎样。。。

Quaternity means the successful reason of the Chinese New Education Movement is the four relations between of the Old and the Modern,the Up and the Down,the Chinese and the Global and the Surface and the Inside.

导论部分重点论述了选题原因,对相关概念了必要的界定,从六个方面系统梳理了相关的研究成果,并就本论题所选用的研究理论和方法了扼要的阐释,最后对论题的大体框架了一个宏观的介绍。

Based on Pseudo-linearization and least square methods, the bearings-only target motion problem was studied under the conditions that the target takes uniform rectilinear motion in 2-dimensional space, the single observer takes uniform rectilinear motion first, and then takes rectilinear motion with constant acceleration. The necessary and sufficient observable conditions, some unobservable conditions are gained.

基于拟线性处理和最小二乘方法,在目标匀速直线运动,单观测站匀速直线运动,进而匀加速直线运动的机动情形下,研究了二维纯方位系统的可观测性,得到了系统可观测性的充要条件以及系统的某些不可观测的条件。

Embarked on the definition and research object of CEDZs, this article first made some introduction of the developing phases of the world's developing areas; then it dealt with the theoretical secundum, objective and strategic meaning of the developments of CEDZs. After that, it made some concise descriptions of the historical developments of CEDZs, focusing on analyzing and researching of the CEDZs'past experience and theories. It holds that CEDZs helps to push ahead with China's urbanization, industrialization, high-technology development, economic development, modernization, reform and open-gate policy process. At the same time, there are also some drawbacks existing.

本文从开发区的涵义和研究对象着手,首先介绍了世界开发区的演进与发展;然后就中国开发区建设的理论依据、目的及战略意义了论述;随后再对中国开发区的历史发展了简要描述后,重点对中国开发区的经验与理论了分析和探索,认为开发区推动了我国城市化进程、工业化进程、高新技术发展进程、经济发展和现代化进程以及改革开放进程,同时开发区在发展过程中也存在一系列的误区。

There were inflammatory cells infiltrating in the myocardium sparely and no calcification in the pericardium in IVIG and IVIG+VitC groups. The size of spleens enlarged especially in IVIG and IVIG+VitC groups.

心脏分为三部分:一部分病理切片和H-E染色,一部分冰冻切片,在荧光显微镜下用直接免疫荧光法测定心肌组织中沉积的IgG水平,一部分电镜检查。

Lyricism to lyric means of literature are diverse: one is willing to speak one's mind's made, the hero is the author's own, works directly express the hero's thoughts and feelings, showing the hero's personality characteristics; One is the care of things for Yan Zhi, the work is not that the author's own hero, but the author's thoughts and feelings of the sustenance of the objects, including figures, there are things, as well as by the negative objects; one is made by the King of the lyric, that is landscape features poetry, on the surface, written by the author saw and heard was not the hero tone of voice to express thoughts and feelings, but in fact the author is described by the mountain scenery to send Italian lyric, its hero is actually author.

抒情文学借以抒情的手段是多种多样的:一种是直抒胸臆之,主人公就是者自己,品直接抒发主人公的思想感情,显示主人公的性格特点;一种是托物言志之品的主人公并不就是者自己,而是者的思想感情所寄托的对象,其中有人物、有事物,还有者否定的对象;一种是借景抒情之,即山水景物诗文,表面上看,所写者所见所闻并不是者以主人公口吻来抒发的思想感情,但实际上者是借山林景色的描写来寄意抒情,其主人公实际上就是者。

He will neither come nor go at the divine command, but sullenly prefers to do what he should not, and to leave undone that which is required of him.

他在工岗位上打盹,应当活动之时却偷懒。对上帝的命令不理不睬,故意去不该的事,要求他的反倒不

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Cynanchum Lingtai apricot production in the average weight 65 grams, the brightly-colored fruit, juicy rich, sweet-sour taste, sweet from the nucleolus, when the late Qing Dynasty famous Shaanxi, Gansu provinces, the Qing imperial court Tongzhi tribute for years.

灵台生产的牛心杏平均单果重65克,果实色泽鲜艳,汁多味浓,甜酸适口,离核仁甜,清末时就驰名陕、甘两省,清同治年间曾为朝廷贡品。

Chenopodium album,Solanum nigrum, and Amaranthus retroflexus were very susceptible to the herbicides. Polygonum persicaria and Abutilon theophrasti were relatively less susceptible to the herbicides, and Lycopersicon esculentum was not susceptible to it. The relationship between reduction rates of weed biomass and PPM values of weed leaves 2,4, and 6 days after treatment was established.

供试的6种杂草对该混剂的敏感性存在显著差异:红心藜Chenopodium album、龙葵Solanum nigrum和反枝苋Amaranthus retroflexus对该混剂最敏感,ED90值分别为47.65、71.67和29.17g/hm2;春蓼Polygonum persicaria和苘麻Abutilon theophrasti敏感,ED90值分别为96.91、114.20g/hm2;而番茄不敏感。

However, I have an idea.

不过,我有个主意。