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An approach by applying the capacitance-sensing principle to measure the interior vertical profile of a high aspect ratio micro part, such as a hole with 1.0mm diameter, is proposed and implemented.

本论文提出一新型、结构简化之电容感测式探针,配合自行开发的量测系统进行具有高深宽比特徵的微孔垂直轮廓量测。

The major research objective of this thesis is to investigate the process researches which relate to near field photolithography process and inverse calculation of the probe aperture size by nondestructive method.

摘要 本文主要的研究目的在探讨近场光学微影加工制程及非破坏方法逆解光纤探针口径之相关研究。

The load carrying capacity and antiwear property of S,P containing benzotriazole derivative (BM 3) were evaluated using a four ball test machine,and compared with those of zinc salt di(T 202 ) and amine salt of complex ester thiophosphate (T 307 ). The antiwear mechanism of BM 3 were studied by investigating the chemical states and the mass fraction of elements on the rubbed surfaces using X ray photoelectron spectroscopy and electron probe microanalysis and the thermal decomposition products using gas chromatography mass spectrograph.

在四球机上对照评价了含硫、磷苯并三氮唑衍生物(BM-3)和二丁辛基二硫代磷酸锌(T202)及硫磷酸复酯胺盐(T307)的承载能力和抗磨性能,用X射线光电子能谱仪和电子探针微分析仪等对磨斑表面元素N,S和P的存在形式及表面膜的组成进行了分析,用气相色谱-质谱联用仪对BM-3的热分解产物进行了分析,并且还对其极压抗磨作用机理作了探讨。

The microardness and elastic modulus of the MAO ceramic coating were determined by the mechanical properties microprobe.

使用显微力学探针测定了膜的硬度和弹性模量分布,并探讨了微弧放电对氧化膜和钛合金基体组织、性能的影响。

The monazite samples of various genetic types are taken fro m different localities in China and have been analysed by EPMA.

采用电子探针分析研究了花岗岩、伟晶岩和热液交代等三种不同成因的独居石微粒微区成分分布的特征。

Resistance pure water system, 3-waste treatment system, and shock-proof working-table, and about 80 sets of micro-electrical-mechanical technical equipment are installed, including AMS200 ICP plasma etching system, ICP-2B etching machine, AWB04 bonding machine, MA6/BA6 Karlsus double-face photolithography machine/bonding machine, POLI-400 chemical-mechanical-polishing tool, WL2040 aluminum-wire press welder, OPTI CAOT 22i decktop precision spin coasting system, ZSH406 automatic dicing saw system, DQ-500 plasma photoresist-removing machine, HXS150S automatic centrifugal spinner, AXTRON MOCVD metal organic chemical vapor deposit system, 4470 micro-control 4-tube diffusing furnace, type 4371 LPCVD low pressure chemical vapor deposit system, OMICRON MBE molecular beam epitaxy system, JS-3X100B magnet-control spattering equipment, PECVD-2E plasma deposit apparatus, ZZSX500C electron-beam vapor equipment, JC500-3/D magnet-control spattering-coating machine, H63-14/ZM quartz-tube cleaning machine. Measurement instruments include OLS1100 Confocal Laser Scanning Microscope, DEKTAKIII Surface Profiler, D41-11A/ZN 4-probe resistance test instrument, Nikon L150 metallurgical microscope, and so on.

中心现有80多台各种微机电工艺设备,如AMS 200深硅等离子体刻蚀系统、ICP-2B刻蚀机、AWB04键合机、MA6/BA6 Karlsuss双面光刻机和键合机、POLI-400化学机械抛光机、WL2040铝丝压焊机、OPTI CAOT 22i喷涂胶机系统、ZSH406全自动划片机、DQ-500等离子去胶机、全自动清洗甩干机、AXTRON MOCVD金属有机物化学气相沉积系统、4470微控四管扩散炉、4371LPCVD低压化学沉积系统、OMICRON分子束外延系统、JS-3X100B磁控溅射台、PECVD-2E等离子淀积台、ZZSX500C电子束蒸发台、JC500-3/D磁控溅射镀膜机、石英管清洗机,以及多种常用测试仪器,如OLS1100激光共聚焦显微镜、DEKTAK-III台阶测量仪、D41-11A/ZN四探针电阻测试仪、Nikon L150金相显微镜等。

To observe the influence of temperature and perfusate modifier on in-vitro mass transfer coefficient of microdialysis with sinomenine as a model drug.

考察温度及灌流液改性剂对青藤碱微透析探针体外物质转移系数的影响。

According the demand of the national"908"special project, the distribution of the detrital minerals and the characteristics of genetic mineralogy of the surficial sea-floor sediments offshore Hainan islands(CJ19 subzone) were studied by means of lens stereoscope, micropolariscope, SEM, EMPA and LA-ICPMS.

依托国家"908"专项项目,借助立体及偏光光学显微镜、扫描电镜、电子探针微分析和激光剥蚀等离子质谱等先进技术手段和方法,对环海南岛海域(CJ19区块)海底表层沉积物中碎屑矿物的分布和锆石、石榴石的成因矿物学进行了研究。

By microarray analysis (22 000 probe sets), 110 dysregulated genes were identified in BAV compared with tricuspid aortic valve patients and control donors; 8 were genes of the metallothionein family.

通过微点阵分析(22 000探针设置),与三叶式主动脉瓣病人和对照的供者比较,BAV中110个失调的基因被鉴别出来,其中8个基因为金属硫蛋白家族。

Six kinds of minerals, such as pyrites, arsenopyrite, sphalerite, galena and cassiterite from various metallogenic stages, ore blocks and ore type s were analyzed by EMPA.

文章总结和划分了矿床的矿石类型、矿化阶段及其在空间上的分布;对不同阶段、不同地段和不同类型的黄铁矿类、毒砂、黄铜矿、闪锌矿、方铅矿和锡石等 6种主要矿石矿物进行了电子探针微区分析。

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