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After polishing dummy feature pattern are placed into the layout, the planarity can be examined on a local level (a portion but not all of the device) and a more global level (all of the device, devices corresponding to a reticle field, or even an entire wafer).

在抛光虚设特征图形被放置在布图中之后,可在局部程度(一部分但不是全部的器件)和比较全面的程度(全部的器件,与标线场对应的器件,或者甚至整个晶片)上检查平面度

Factory design and production of various high-precision zoom lens, projector lens and as high as /20 flatness of the plane mirror is widely used in a variety of measuring instruments; factory production testing of optical imaging lens, the resolution of 2300000 pixels, relative distortion of 0.05%, which is high-precision imaging and quality measurement of choice for detection.

本厂设计生产的各种高精度变焦镜头、投影仪物镜及平面度高达λ/20的平面镜,广泛应用于各种测量仪器;本厂生产的光学影像检测镜头,其分辨率达到230万像素,相对畸变为0.05%,是高精度影像测量及品质检测的首选。

Installed the high speed spinning tube and other machine parts, the framework junction parts is designed not only strength enough but also higher accuracy in dimensional and plane.

该框架结构件上装有高速运转纱筒和其他机件,设计要求框架不但有足够的强度而且有较高的尺寸精度和平面度

The machine is scientific designed with strong air-float strength and fine flatness. There are longitudinal and widthwise plate-against device.

整机设计合理,气浮力大,分纵向和横向气缸顶片装置,台面平面度好。

There are longitudinal and widthwise plate-against device.

整机设计合理,气浮力大,分纵向和横向气缸顶片装置,台面平面度好。

By means of declinate optical triangulation measuring instrument structure which is firstly proposed, the measured area and resolution of this measuring system are greatly increased, and the high accuracy non-contact measurement of the planeness of a large area plane is realized.

提出的虚拟精密基准的建模与误差补偿技术,解决了在非精密基准上实现精密测量的问题,研制的系统利用现有平台可实现对太阳帆板平面度的高精度测量。

Furthermore, we have analyzed and deduced anothergroup of error formulas for measuring planeness of large terrace byother two methods

并对其它两种方法测量平面度的误差亦进行了分析和数学公式的推导。

Using the complex optimization method, the planeness error value can be evaluated quickly and accurately on a microcomputer.

利用复合形优化方法,在微型计算机上可迅速、准确地求出此准则下的平面度误差值。

In this paper, We have mainly analyzed and deduced a group oferror formulas for measuring planeness of large terrace by diagonal me-thod from the principle of unequal accuracy.

本文以不等精度原则,着重分析了对角线法测量平面度的误差,推导出了精度较高的数学表达式。

In light of such problems as the long production period and the difficulty in controlling the planeness while polishing the surface of the coupler , a new design of the coupler is proposed

针对制作周期太长、控制研磨面平面度难等问题,提出了一种新的耦合器改进方案,并提出了一种可对打磨过程中包层剩余厚度进行实时监控的方法-液滴法。

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