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Semiconductor industry has been a central figure to the economic growth in Taiwan, especially for the fabrication sector of integrated circuit that has evolved into world-leading status. The fabrication technology advances so far that the feature size (or critical line-width) of IC devices has now broken the 0.1 ?慆 barrier and into the nano-scale age. This progress discloses that the traditional definition of a "cleanroom" environment may become increasingly inadequate because prevention of particulate contamination may no longer be a critical issue. As the condensable organic airborne molecular contaminants depositing on wafer surfaces, it results in deterioration on device performance and reduces semiconductor device yield.

半导体产业已成为我国最重要的经济发展产业,其中积体电路制造技术的快速发展,使我国早已跃升成为世界晶圆代工重镇之一,然而当制程的关键线宽尺寸突破0.1微米而正式进入奈米等级之际,传统针对微粒污染控制所设计之洁净室将无法符合气态分子污染物之洁净需求,其中凝结性有机分子污染物质(organic airborne molecular contaminants)一旦沈积吸附於晶圆表面,将导致元件缺陷与制程良率下降。

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