查询词典 silicon

The invention discloses a method to integrate single CMOS with bulk silicon microelectromechanical system, its technical project: 1 forming isolating groove: adopting deep-groove etching, and SiO2 and polycrystal silicon filling to realize the insulation of MEMS structure and CMOS circuit; 2 making standard CMOS circuit; 3 using SiO2 and Si3N4 as mask, etching silicon on the back until exposing SiO2 at the bottom of the isolating groove, to complete the thickness control for MEMS silicon structure layer; 4 completing metalizing the CMOS circuit and masking the MEMS structure: MEMS structure region uses Al as mask and CMOS circuit region uses thick photoetching glue as mask, using DRIE to release silicon structure.

本发明公开了一种将单片CMOS与体硅微机械系统集成的方法，其技术方案为：1形成隔离槽：采用深槽刻蚀，SiO 2 和多晶硅填充，实现MEMS结构和CMOS电路的绝缘；2完成隔离槽后进行标准CMOS电路的加工；3用SiO 2 和Si 3 N 4 作掩膜，从背面腐蚀硅，直至暴露出隔离槽底部的SiO 2 ，完成MEMS硅结构层的厚度控制；4完成CMOS电路金属化和MEMS结构掩膜：MEMS结构区用铝作掩膜，CMOS电路区用厚光刻胶作掩膜，用DRIE释放硅结构。用本发明方法不仅获得了较大的质量块，而且用本发明较高的深宽比制作出的结构电容，同时实现了体硅微机械与CMOS电路的集成，显著提高MEMS传感器的精度和稳定性，具有前沿性和重要实用价值。

The growth mechanism of silver seed on silicon has been presented: at first, the silver monolayer and multilayer firstly grows onto silicon without fully covering the surface at the expense of silicon etching due to the silver seed attracting the electron from silicon, after that, the monolayer coalesces together, forming continuous grain film with some silver atoms diffusing into the silicon and the multilayer still grows thick simultaneously.

提出了银晶籽在硅表面的生长机理是：首先是在硅表面没有被完全覆盖的情况下，单层银晶籽生长的同时伴随有多层的生长，此后单层逐渐形成连续的薄膜，在单层晶籽层上多层薄膜逐渐增厚，并伴随有部分银原子向硅中的扩散。

In this dissertation,preparation and thermoelectric characterization of conventional silicon-based materials and devices have been studied, including amorphous silicon films, polycrystalline silicon germanium films and amorphous silicon thin-film-transistors. A novel MEMS-IC integration method based on porous silicon micromachining has been developed, which is used to fabricate resistive bolometers with a-Si and polySiGe films, and a-Si TFT-based room-temperature infrared detector pixels and 8×8 arrays with primary capability of thermal imaging have been reported for the first time.

本文深入系统地研究了a-Si薄膜、polySiGe薄膜和a-Si TFT等三种常规硅基材料和器件的制备方法和热电特性，开发了一套新型的基于多孔硅牺牲层技术的MEMS-IC集成工艺，利用该工艺成功地制作了a-Si和polySiGe薄膜电阻式测辐射热计，在国际上首次提出并实现了基于a-Si TFT的室温红外探测器单元与8×8阵列原型，器件初步具备了室温红外热成像的能力。

Silicon wafer with low silicon steel sheet of 2.8% below the high-silicon-silicon content was 2.8%-4.8%, both in actual use there is no strict boundaries, commonly used to create large-scale high-silicon electrical.

矽钢片低硅片含硅2.8％以下，高硅片含硅量为2.8％-4.8％，两者在实际使用中并无严格界限，常用高硅片制造大型电机。

The enterprise can be formed as annual production of polycrystalline silicon 1.3 billion, High-purity silicon tetrachloride 1 thousand tons,φ6"—φ12" polishing flake 2.3 million flake, Silicon extension flake 500 thousand flake, SOI silicon Flake 400 thousand flake, all sorts of zone melting grinding silicon flake 3 million flake, High-purity metal and its compound products 100-150 T/year.

十一五&末期，该企业将形成年产多晶硅130吨、高纯四氯化硅1000吨、φ6&—φ12抛光片230万片、硅外延片50万片、 SOI 硅片40万片、各类区熔硅磨片300万片、高纯金属及其化合物产品100—150T/年的生产能力，并将与新兴硅业、乐山安森美等企业形成完整的硅产品产业链和高纯金属产业基地。

It is analysed by insiders that our national organic silicon industry is at high speed developing period, and at present, the national organic silicon only has 500 kinds; the compound manufacturing and processing capability do not meet the market demand, especially the methyl chloride silicon hydride making, has become the neck of our national organic silicon, so it have active and real meaning to build this project of organic single silicon and its sub-item products.

据权威人士分析，我国有机硅产业正步入高速发展时期，而目前，国内有机硅产品仅500多个品种，聚合物生产及加工能力均不能满足市场发展的需求，尤其是甲基氯硅烷单体生产远不能满足国内市场的需求，已成为制约我国有机硅生产发展的&瓶颈&，建设有机硅单体及下游产品项目具有积极和现实的意义。

The fabrication processes for nano-silicon-tips using a (100) single crystal silicon wafer by the anisotropic wet etching in the KOH etchant were designed. Based on the experiment and the model of {411} crystal planes, the crystal planes of silicon tips were analyzed. Through discussing the effect of the mask direction on tip shapes, the process parameters to get high aspect ratio nano-silicon-tips were achieved.

设计了硅尖制备的工艺流程，采用KOH溶液湿法各向异性腐蚀(100)单晶硅的方法制备硅尖，根据实验结果和{411}晶面模型，分析了硅尖侧壁的组成晶面，讨论了掩模偏转方向对硅尖形状的影响，得到了制备高纵横比纳米硅尖的工艺参数。

When replacing, firstly, demount the shelters at both ends and the collet of silicon carbide rod, then take out the damaged silicon carbide rod, to be careful when install it, for the silicon carbide rod is easy to be broken. The parts of both ends exposed out of the furnace plate shall be equal, and the collet must be firm, make it well contact with the silicon carbide rod.

更换时先卸下两端保护罩与硅碳棒夹头，然后取出已损坏的硅碳棒，由于硅碳棒易断，安装时须小心，两端露炉壳外部分应相等，夹头必须紧固，使之与硅碳棒接触良好。

Still having a bit is not to become helpless link, this business that I build stands its keyword silicon fireclay and fireproof cement, be in originally Baidu 100 divisions are done not have, and I establish a link in 100 divisions to want to be in, I created 2 vocabulary entry with respect to oneself, one is silicon fireclay one is fireproof cement, website address Www.guihuoni.com stayed in vocabulary entry, silicon fireclay vocabulary entry was passed a long time probably, I examine next links that keep to still be in, bright of a word in the heart, but do not have bright enough a day, go when me that vocabulary entry that when Baidu searchs silicon fireclay, I create still discharges me unexpectedly in front, stand mine to squeeze came down, I am really right it is hated again love again, two words are helpless.

还有一点是不要做无奈的链接，我建的这个企业站其关键词硅火泥和耐火水泥，本来在百度百科是没有的，而我为了想在在百科建个链接，我就自己去创造了二个词条，一条是硅火泥一条是耐火水泥，在词条里留下了网站地址www.guihuoni.com，硅火泥词条大概半天就通过了，我查看下留的链接还在，心里一个字爽，但没爽够一天，当我去百度搜索硅火泥的时候我创造的那词条居然还排我前面，把我的站给挤下来了，我真是对它又恨又爱啊，两个字无奈。

A variety of gram release paper, Glassine paper, kraft paper, double-plastic single silicon paper, double silicon paper, various kinds of imported Release Paper; a variety of PET-off membrane, a single silicon membrane, double-silicon film, the original membrane and white film, black film, membrane switch-specific membrane; all kinds of tape, double-sided tape, Burkina tape, police-style tape, kraft paper tape, textured paper tape, fiber tape; I Division sales PET release film has a different g weight-off edge, and can provide customers from the type of force production.

各种克重离型纸、格拉辛纸、牛皮纸、双塑单硅纸、双硅纸、各种进口离型纸；各种PET离型膜、单硅膜、双硅膜、原膜、白片、黑膜、薄膜开关专用膜；各种胶带、双面胶、布基胶带、警式胶带、牛皮纸胶带、美纹纸胶带、纤维胶带；我司销售的PET离型膜有不同克重的离型力，并可按客户提供的离型力生产。

It was just a normal day of school

那只是上学的普通一天

Which is a very good reference in this issue.

这是一个在这个问题上很好的参考。