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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器,对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计,建立了器件的三维实体模型以及两维降阶模型,对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计,同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程,开展了一系列重要工艺步骤的单项工艺试验,对工艺流程与工艺参数进行了优化,针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析,并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合,建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

As a hypotactic language, more cohesive devices tend to appear in English, especially explicit devices such as reference, while the paratactic featuremakes Chinese apply more implicit cohesive devices such as ellipsis.

总的说来,作为重形合的语言,英语倾向于使用比汉语更多的衔接手段,尤其是照应这样的显性衔接,而汉语的意合特性使它更倾向于用省略这样的隐性手段。

Fusible element is a fixed fire extinguishing systems and fire safety, smoke detection and implementation of the system played the role of temperature control devices, motion devices in the automatic fire extinguishing system, kitchen equipment, fire-fighting equipment, smoke, fire-fighting equipment, fire dampers and smoke dampers implementing agencies, fire shutter temperature-controlled release devices, fire doors automatically closed device to be widely applied.

易熔合金元件是固定灭火系统和防火、排烟系统中起探测和执行作用的感温控制器件,在自动灭火系统动作装置、厨房设备灭火装置、烟雾灭火装置、防火阀和排烟防火阀的执行机构、防火卷帘温控释放装置,防火门自动闭门装置中得到广泛应用。

In this thesis, the AlN thin films were deposited on SiO2/Si and GaN/Sapphire substrates respectively for layered structure SAW devices by Helicon sputtering system. Laser ultrasound system was used to measure the acoustic wave velocity of AlN/SiO2/Si layered structure. Frequency response and insertion loss were measured by an HP8510C vector network analyzer to analysis insertion loss, sidelobe and quality factor. The results showed the possibility of incorporating thin films SAW devices with other semiconductor devices.

本研究使用回旋溅镀系统分别在SiO2/Si、GaN/Sapphire两种基板上沉积AlN并制作层状表面声波元件,并利用雷射超音波系统量测AlN/SiO2/Si结构之表面波速及机电耦合系数,再利用网路分析仪量测其频率响应,分析其插入耗损、 sidelobe、品质因子Q,以比较不同基材所制作之层状表面声波元件之特性,此研究成果初步验证AlN层状表面声波元件与半导体元件整合之可行性。

They are input devices, the system unit, secondary storage, output devices, and communication devices.

他们是输入设备、系统单元、次级存储、输出设备和通信设备。

Otherwise, we design several shapes of the TFT devices, like symmetry structure、non-symmetry structure、differential channel width and length of the TFT devices、micro lens array lie on top of the TFT devices.

除此,利用不同的薄膜电晶体光感测元件设计,如对称式的、非对称式的、不同通道的宽度及长度或是电晶体上方制作微小的聚光透镜等方式。

INPUT DEVICES. Computer systems use many devices for input purpose. some INPUT DEVICES allow direct human/machine communication, while some first require data to be recorded on an input medium such as a magnetizable material.

输入设备计算机系统使用多种输入设备,其中有些输入设备直接进行人一机通信,另一些则首先要求把数据记录在诸如磁性材料那样的输入介质上。

The medical institutions at and above prefecture levels are equipped with medical facilities including 500-750 milliampere X-rays machines, Model B ultrasonic diagnose devices, fiber endoscopes, electroencephalographic devices, rheoencephalographic devices, heart monitors, lung function measuring equipment, and blood gas analyzers, and hospitals at county and township levels are equipped with basic medical facilities such as X-rays machines, multi-parameter monitors, microscopes, electrocardiogram machines and so on.

县和乡镇卫生院配有X光机、多参数监护仪、显微镜、心电图机等基本医疗设备,各级医疗机构服务水平与质量有了显著提高,为切实保障广大人民群众健康发挥了积极作用。

FCS is a new generation of control system after DCS, it represents an unreversed developing direction that digital devices, network devices,control functions,devices management are used in local machines.

现场总线控制系统是继分散控制系统之后出现的新一代控制系统,它所代表的是一种数字化到现场、网络化到现场、控制功能到现场和设各管理到现场的不可逆转的发展方向。

The bondless pressure contact devices are found to have comparable electrical characteristics to substrate mounted devices.however due to differences in the mechanical and thermal properties,these devices may offer exploitable advantages in some applications.

我们发现无焊压装器件和基板安装器件有相当的电气特性。然而由于机械和热特性的不同,在一些应用场合它更可能提供优势。

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相关中文对照歌词
Solution Devices
Left To My Own Devices
To My Own Devices
Futile Devices
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I'm strongly against the death penalty — it's an eye for an eye.

我不赞成死刑——这是以牙还牙的报复行为。

And to get you the support you need, we're enlisting all elements of our national power: our diplomacy and development, our economic might and our moral suasion, so that you and the rest of our military do not bear the burden of our security alone.

并给你们所须的支援,我们正徵召国家所有各种的力量:我们的外交及发展,我们的经济力量与道德劝说,所以你们与其他军人不须要孤独地负起国家安全的责任。

Imagine yourself to be an actor in a play on the stage.

设想你自己是一个演员在舞台上表演。